Magnetically levitated turbopumps Pfeiffer Vacuum

A. Giới thiệu bơm tua bin Pfeiffer Vacuum

Our turbopumps in the ATH M and ATP M series are not just magnetically levitated – an active 5-axis magnetic bearing monitors the position of the rotor and regulates any deviation from the correct position in real-time. Through the use of this high-quality bearing technology, we achieve the best possible long-term stability and reliability coupled with quiet running properties. The bearing technology and process orientation of the high vacuum pumps make our ATH M and ATP M series a benchmark for high-performance turbopumps in semiconductor production, coating and dry-etching plasma processes as well as in many industrial and R&D applications.

B. Turbopumps with 5-axis magnetic levitation

1. Turbopumps HiPace® 300 M | Turbopumps Pfeiffer Vacuum

• HiPace® 300 M with TC 700, DN 100 ISO-K (PM P03 950)
• HiPace® 300 M with TC 700, DN 100 ISO-F (PM P03 951)
• HiPace® 300 M with TM 700, DN 100 CF-F (PM P03 952)
• HiPace® 300 M with TM 700 , Profibus, DN 100 ISO-K (PM P03 953)
• HiPace® 300 M with TM 700, Profibus, DN 100 ISO-F (PM P03 954)
• HiPace® 300 M with TC 700, Profibus, DN 100 CF-F (PM P03 955)
• HiPace® 300 M with TC 700, DeviceNet, DN 100 ISO-K (PM P03 956)
• HiPace® 300 M with TM 700, DeviceNet, DN 100 ISO-F (PM P03 957)
• HiPace® 300 M with TC 700, DeviceNet, DN 100 CF-F (PM P03 958)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, DN 100 ISO-K (PM P05 160)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, DN 100 ISO-F (PM P05 161)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, DN 100 CF-F (PM P05 162)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, Profibus, DN 100 ISO-K (PM P05 163)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, Profibus, DN 100 ISO-F (PM P05 164)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, Profibus, DN 100 CF-F (PM P05 165)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 100 ISO-K (PM P05 166)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 100 ISO-F (PM P05 167)
• HiPace® 300 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 100 CF-F (PM P05 168)

2. Turbopumps HiPace® 700 M

• HiPace® 700 M with TM 700, DN 160 ISO-K (PM P04 450)
• HiPace® 700 M with TM 700, DN 160 ISO-F (PM P04 451)
• HiPace® 700 M with TM 700, DN 160 CF-F (PM P04 452)
• HiPace® 700 M with TM 700 , Profibus, DN 160 ISO-K (PM P04 453)
• HiPace® 700 M with TM 700, Profibus, DN 160 ISO-F (PM P04 454)
• HiPace® 700 M with TM 700, Profibus, DN 160 CF-F (PM P04 455)
• HiPace® 700 M with TM 700, DeviceNet, DN 160 ISO-K (PM P04 456)
• HiPace® 700 M with TM 700, DeviceNet, DN 160 ISO-F (PM P04 457)
• HiPace® 700 M with TM 700, DeviceNet, DN 160 CF-F (PM P04 458)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, DN 160 ISO-K (PM P04 980)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, DN 160 ISO-F (PM P04 981)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, DN 160 CF-F (PM P04 982)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, Profibus, DN 160 ISO-K (PM P04 983)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, Profibus, DN 160 ISO-F (PM P04 984)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, Profibus, DN 160 CF-F (PM P04 985)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 160 ISO-K (PM P04 986)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 160 ISO-F (PM P04 987)
• HiPace® 700 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 160 CF-F (PM P04 988)

3. Turbopumps HiPace® 800 M

• HiPace® 800 M with TC 700, DN 200 ISO-K (PM P04 460)
• HiPace® 800 M with TM 700, DN 200 ISO-F (PM P04 461)
• HiPace® 800 M with TM 700, DN 200 CF-F (PM P04 462)
• HiPace® 800 M with TC 700 , Profibus, DN 200 ISO-K (PM P04 463)
• HiPace® 800 M with TM 700, Profibus, DN 200 ISO-F (PM P04 464)
• HiPace® 800 M with TC 700, Profibus, DN 200 CF-F (PM P04 465)
• HiPace® 800 M with TC 700, DeviceNet, DN 200 ISO-K (PM P04 466)
• HiPace® 800 M with TM 700, DeviceNet, DN 200 ISO-F (PM P04 467)
• HiPace® 800 M with TC 700, DeviceNet, DN 200 CF-F (PM P04 468)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, DN 200 ISO-K (PM P04 990)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, DN 200 ISO-F (PM P04 991)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, DN 200 CF-F (PM P04 992)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, Profibus, DN 200 ISO-K (PM P04 993)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, Profibus, DN 200 ISO-F (PM P04 994)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, Profibus, DN 200 CF-F (PM P04 995)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 200 ISO-K (PM P04 996)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 200 ISO-F (PM P04 997)
• HiPace® 800 M with TM 700 and power supply pack OPS 400, DeviceNet, DN 200 CF-F (PM P04 998)

4. Turbopumps HiPace® 1600 M

• ATH 1600 MT, DN 200 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated (P6522103)
• ATH 1600 MT, DN 200 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated (P6562103)
• ATH 1600 MT, DN 250 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated (P6622103)
• ATH 1600 MT, DN 250 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated (P6662103)
• ATH 1603 M, DN 200 ISO-F, with Integrated Drive Electronics, Water-Cooled, Non-Heated (Y2522100)
• ATH 1603 M, DN 200 ISO-F, with integrated drive electronics, water-cooled, non-heated (Y2562100)
• ATH 1603 M, DN 250 CF-F, with Integrated Drive Electronics, Water-Cooled, Non-Heated (Y2622100)
• ATH 1603 M, DN 250 ISO-F, with integrated drive electronics, water-cooled, non-heated (Y2662100)
• ATH 1603 M, DN 200 CF-F, OBC V4 Integrated Drive Electronics, Remote, Water-Cooled, Non-Heated (YC52215A)
• ATH 1603 M, DN 200 ISO-F, with Integrated Drive Electronics OBC V4, Remote, Water-Cooled, Non-Heated (YC56215A)
• ATH 1603 M, DN 250 CF-F, OBC V4 Integrated Drive Electronics, Remote, Water-Cooled, Non-Heated (YC62215A)
• ATH 1603 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, Remote, Water-Cooled, Non-Heated (YC66215A)
• ATH 1603 M, DN 200 CF-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated (YE52215A)
• ATH 1603 M, DN 200 ISO-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated (YE56215A)
• ATH 1603 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated (YE62215A)
• ATH 1603 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated (YE66215A)
• ATH 1603 M, DN 200 CF-F, with Integrated Drive Electronics OBC V4, Profibus, Water-Cooled, Non-Heated (YG52215A)
• ATH 1603 M, DN 200 ISO-F, with Integrated Drive Electronics OBC V4, Profibus, Water-Cooled, Non-Heated (YG56215A)
• ATH 1603 M, DN 250 CF-F, with Integrated Drive Electronics OBC V4, Profibus, Water-Cooled, Non-Heated (YG62215A)
• ATH 1603 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, Profibus, Water-Cooled, Non-Heated (YG66215A)

5. Turbopumps HiPace® 2300 M

• ATH 2300 MT, DN 250 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated (Q6622100)
• ATH 2300 MT, DN 250 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated (Q6662100)
• ATH 2303 M, DN 250 CF-F, with External Drive Electronics, Water-Cooled, Non-Heated (TMB206220000)
• ATH 2303 M, DN 250 ISO-F, with external drive electronics, water-cooled, non-heated (TMB206620000)
• ATH 2303 M, DN 250 CF-F, OBC V4 Integrated Drive Electronics, Remote, Water-Cooled, Non-Heated (TMBBA622005A)
• ATH 2303 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, Remote, Water-Cooled, Non-Heated (TMBBA662005A)
• ATH 2303 M, DN 250 CF-F, with Integrated Drive Electronics OBC V4, Profibus, Water-Cooled, Non-Heated (TMBBB622005A)
• ATH 2303 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, Profibus, Water-Cooled, Non-Heated (TMBBB662005A)
• ATH 2303 M, DN 250 CF-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated (TMBBC622005A)
• ATH 2303 M, DN 250 ISO-F, with Integrated Drive Electronics OBC V4, DeviceNet, Water-Cooled, Non-Heated (TMBBC662005A)

6. Turbopumps HiPace® 2804 M

• ATH 2804 M, DN 250 ISO-F, Water-Cooled, Non-Heated, with Integrated Drive Electronics (TMAAA664015A)
• ATH 2804 MT, DN 250 ISO-F, Water-Cooled, Non-Heated, with Integrated Drive Electronics (TMAAA6681101)

7. Turbopumps HiPace® 3204 M

• ATH 3204 M, DN 320 ISO-F, Water-Cooled, Non-Heated, with Integrated Drive Electronics (TMAAAC64015A)
• ATH 3204 MT, DN 320 ISO-F, Water-Cooled, Heated, with Integrated Drive Electronics (TMAAAC681101)

8. Turbopumps HiPace® 500 M

• ATH 500 M, DN 100 ISO-K, Remote, Air-Cooled, Non-Heated (V2311100)
• ATH 500 M, DN 100 ISO-K, Remote, Water-Cooled, Non-Heated (V2312100)
• ATH 500 M, DN 100 CF-F, Remote, Air-Cooled, Non-Heated (V2321100)
• ATH 500 M, DN 100 CF-F, Remote, Water-Cooled, Non-Heated (V2322100)
• ATH 500 M, DN 100 ISO-F, Remote, Air-Cooled, Non-Heated (V2361100)
• ATH 500 M, DN 100 ISO-F, Remote, Water-Cooled, Non-Heated (V2362100)
• ATH 500 M, DN 160 ISO-K, Remote, Air-Cooled, Non-Heated (V2411100)
• ATH 500 M, DN 160 ISO-K, Remote, Water-Cooled, Non-Heated (V2412100)
• ATH 500 M, DN 160 CF-F, Remote, Air-Cooled, Non-Heated (V2421100)
• ATH 500 M, DN 160 CF-F, Remote, Water-Cooled, Non-Heated (V2422100)
• ATH 500 M, DN 160 ISO-F, Remote, Air-Cooled, Non-Heated (V2461100)
• ATH 500 M, DN 160 ISO-F, Remote, Water-Cooled, Non-Heated (V2462100)
• ATH 500 M, DN 100 ISO-K, Profibus, Air-Cooled, Non-Heated (VY311100)
• ATH 500 M, DN 100 ISO-K, Profibus, Water-Cooled, Non-Heated (VY312100)
• ATH 500 M, DN 100 CF-F, with Profibus, Air-Cooled, Non-Heated (VY321100)
• ATH 500 M, DN 100 CF-F, Profibus, Water-Cooled, Non-Heated (VY322100)
• ATH 500 M, DN 100 ISO-F, with Profibus, Air-Cooled, Non-Heated (VY361100)
• ATH 500 M, DN 100 ISO-F, Profibus, Water-Cooled, Non-Heated (VY362100)
• ATH 500 M, DN 160 ISO-K, Profibus, Air-Cooled, Non-Heated (VY411100)
• ATH 500 M, DN 160 ISO-K, Profibus, Water-Cooled, Non-Heated (VY412100)
• ATH 500 M, DN 160 CF-F, with Profibus, Air-Cooled, Non-Heated (VY421100)
• ATH 500 M, DN 160 CF-F, Profibus, Water-Cooled, Non-Heated (VY422100)
• ATH 500 M, DN 160 ISO-F, with Profibus, Air-Cooled, Non-Heated (VY461100)
• ATH 500 M, DN 160 ISO-F, Profibus, Water-Cooled, Non-Heated (VY462100)
• ATH 500 MT, DN 100 ISO-K, Remote, Heated (VR312103)
• ATH 500 MT, DN 100 CF-F, Remote, Heated (VR322103)
• ATH 500 MT, DN 100 CF-F, Remote, Heated (VR362103)
• ATH 500 MT, DN 160 ISO-K, Remote, Heated (VR412103)
• ATH 500 MT, DN 160 CF-F, Remote, Heated (VR422103)
• ATH 500 MT, DN 160 ISO-F, Remote, Heated (VR462103)

Turbopumps Pfeiffer Vacuum | Magnetically levitated turbopumps | Pfeiffer Việt Nam